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Microelectronics I

Objectives

The course of Microelectronics I aims to transmit to the students the theoretical and practical foundations of the materials and processes used in the semiconductor industry and microelectronics, focusing on the manufacture of devices.

General characterization

Code

11044

Credits

6.0

Responsible teacher

Pedro Miguel Cândido Barquinha

Hours

Weekly - 6

Total - Available soon

Teaching language

Português

Prerequisites

Available soon

Bibliography

-       R. Jaeger "Introduction to Microelectronic Fabrication", Addison Wesley Publishing Company (1993)

-       S. Franssila "Introduction to Microfabrication", 2nd Edition, Wiley (2010)

-      Lectures Slides.

Teaching method

The course content will be trasmitted according to a lecture method (with slideshow / powerpoint), encouraging interaction, dialogue-oriented and discussion with students in the classroom, stimulating pedagogical action. The lectures will be supplemented with the completion of 3 laboratory classes and solving multiple exercices, thus promoting a strong link between theory and practice.

Evaluation method

Evaluation:

Tests (relative weights). Optional and preferentially presential or if not possible via Moodle

- Theory: 50%

- Practical: 50%

The students who do not want to, or cannot, make tests may take an exam in "Exame season" that will replace the tests.

Marks >=15/20 obtained via Moodle can be subjected to subsequent oral examination 


Conditions for exemption from exams:

- Average score of tests >=9.5​​.
 
"Frequencia"
Score >=9,5/20 in the group of:

  • 3 group lab questionnaires about the lab works (60 %)
  • Exercices to solve individually during the semester (20 %)
  • Individual answers to scientific and technological questions related with the CU, released during the semester via Moodle (20 %) 

It is valid for one year
 
 
Final Score
 50% tests average score* + 50% score TP (lab questionnaires, exercices, answers, see details in section above)
or
50% exam score* + 50%  score TP ((lab questionnaires, exercices, answers, see details in section above)

(*) - If this score is less than 9.5 then the final score does not come into account with the TP score.

Subject matter

Theoretical / Practical

Chapter 1 - Perspective on the processes of microelectronics.

Chapter 2 - Growth of single crystals.

Chapter 3 - Thermal oxidation.

Chapter 4 - Etching

Chapter 5 - Lithography

Chapter 6 - Diffusion.

Chapter 7 - Ion Implantation.

Chapter 8 - Deposition of thin films.

Chapter 9 - Contacts and interconnections.

Chapter 10 - Future of microelectronics.

 

Lab classes

Processes in microelectronics

Lab work 1 - Thermal oxidation

Lab work 2 - Photolithography and Diffusion

Lab work 3 - Characterization of pn junction