The course of Microelectronics: Processes aims to transmit to the students the theoretical and practical foundations of the materials and processes used in the semiconductor industry and microelectronics, focusing on the manufacture of devices.
Elvira Maria Correia Fortunato, Luís Miguel Nunes Pereira
Weekly - 5
Total - 80
Basic knowledge on Physics, Chemistry and Mathematics.
- R. Jaeger "Introduction to Microelectronic Fabrication", Addison Wesley Publishing Company (1993)
- Lectures Slides.
The course content will be transmitted according to a lecture method (with slideshow / powerpoint), encouraging interaction, dialogue-oriented and discussion with students in the classroom, stimulating pedagogical action. The lectures will be supplemented with the completion of 5 laboratory clases, thus promoting a strong link between theory and practice.
Tests (relative weights)
- Theory: 50%
- Practical: 50%
Conditions for exemption from exams
- Average score of tests not less than 10 (9.5).
Score equal to or higher than 10 in the report of the lab classes
It is valid for one year
50% tests average score* + 50% report score
50% exam score* + 50% report score
(*) - If this score is less than 9.5 then the final score does not come into account with the report of lab classes.
Students with a final average higher than 15 can be asked to orally defend the final classification.
Theoretical / Practical
Chapter 1 - Perspective on the processes of microelectronics.
Chapter 2 - Lithography.
Chapter 3 - Growth of single crystals.
Chapter 4 - Thermal oxidation.
Chapter 5 - Diffusion.
Chapter 6 - Ion Implantation.
Chapter 7 - Deposition of thin films.
Chapter 8 - Contacts and interconnections.
Chapter 9 - Encapsulation.
Manufacture of crystalline silicon diodes and MOS transistors
Lab work 1 - Thermal oxidation and lithography
Lab work 2 - Diffusion
Lab work 3 - Thermal Oxidation II and lithography II
Lab work 4 - Deposition of metal contacts and lithography III
Lab work 5 - Characterization of electrical devices
Programs where the course is taught: