Microelectronics: Processes
Objectives
The course of Microelectronics: Processes aims to transmit to the students the theoretical and practical foundations of the materials and processes used in the semiconductor industry and microelectronics, focusing on the manufacture of devices.
General characterization
Code
12696
Credits
6.0
Responsible teacher
Luís Miguel Nunes Pereira
Hours
Weekly - 5
Total - 80
Teaching language
Português
Prerequisites
Basic knowledge on Physics, Chemistry and Mathematics.
Bibliography
- R. Jaeger "Introduction to Microelectronic Fabrication", Addison Wesley Publishing Company (1993)
- Lectures Slides.
Teaching method
The course content will be trasmitted according to a lecture method (with slideshow / powerpoint), encouraging interaction, dialogue-oriented and discussion with students in the classroom, stimulating pedagogical action. The lectures will be supplemented with the completion of 5 laboratory clases, thus promoting a strong link between theory and practice.
Evaluation method
Evaluation
Theoretical component
Two tests (elective) – 75%
“Scouting” tests done during the classes – 25%
Or
Exam
Score on continuous evaluation or exam must be >=9.5/20
Practical component - “Frequência”:
Score must be >=9.5/20 in the practical component:
Final Score:
50% average continuous evaluation (or Exam) + 50% practical component
Subject matter
Theoretical / Practical
1 - Growth of Monocrystals
2 - Thermal Oxidation
3 - Lithography
4 - Diffusion
5 - Ionic Implantation
6 - Etching
7 - Deposition of thin films (PVD and CVD)
9 - Contacts and interconnections
10 – Performance improvement
Pratical classes
Exercises
1 – Crystal growth
2 - Thermal Oxidation.
3 – Lithography and etching
4 – Diffusion
5 – Ionic implantation
Lab Classes
1 – Thermal Oxidation
2 – Lithography
3 - Etching
4 – Diffusion
5 – Metallization
6 - Characterization
Programs
Programs where the course is taught: