Microelectronics
Objectives
The course of Microelectronics: Processes aims to transmit to the students the theoretical and practical foundations of the materials and processes used in the semiconductor industry and microelectronics, focusing on the manufacture of devices.
General characterization
Code
12728
Credits
6.0
Responsible teacher
Available soon
Hours
Weekly - Available soon
Total - 80
Teaching language
Português
Prerequisites
Basic knowledge on Physics, Chemistry and Mathematics.
Bibliography
- R. Jaeger "Introduction to Microelectronic Fabrication", Addison Wesley Publishing Company (1993)
- Lectures Slides.
Teaching method
Available soon
Evaluation method
Available soon
Subject matter
Theoretical / Practical
Chapter 1 - Perspective on the processes of microelectronics.
Chapter 2 - Lithography.
Chapter 3 - Growth of single crystals.
Chapter 4 - Thermal oxidation.
Chapter 5 - Diffusion.
Chapter 6 - Ion Implantation.
Chapter 7 - Deposition of thin films.
Chapter 8 - Contacts and interconnections.
Chapter 9 - Encapsulation.
Lab classes
Manufacture of crystalline silicon diodes and MOS transistors
Lab work 1 - Thermal oxidation and lithography
Lab work 2 - Diffusion
Lab work 3 - Thermal Oxidation II and lithography II
Lab work 4 - Deposition of metal contacts and lithography III
Lab work 5 - Characterization of electrical devices